{"id":11825,"date":"2024-09-26T06:25:55","date_gmt":"2024-09-25T21:25:55","guid":{"rendered":"https:\/\/angangsm.com\/?page_id=11825"},"modified":"2024-11-26T06:01:57","modified_gmt":"2024-11-25T21:01:57","slug":"display","status":"publish","type":"page","link":"https:\/\/angangsm.com\/en\/spincoater\/display\/","title":{"rendered":"Operation Display"},"content":{"rendered":"

Various programs and settings in a simple display<\/h3><\/div><\/div><\/div>
Easy to program and check test conditions<\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Our spin coater's operation display shows real-time rpm and vacuum pressure. A variety of programs can be easily entered through the simple display.
\nThe character display LCD module used in standard models can display up to 80 characters (20 characters x 4 lines). Depending on the specifications, the Customized models can display up to 160 characters (40 characters x 4 lines).\n<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

How to Operate Standard Model<\/h3><\/div><\/div><\/div>
Menu<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1: EXCUTE - Start operation
\n2: EDIT - Input, delete or copy recipes
\n3: TEST - Start test operation
\n4: POSITION - Set stop position
\n\u25cf\tWhen \u201c3: TEST\" is disabled in the manufacturer's setting mode, \u201c3: POSITION\u201d is displayed instead.
\n\u25cf\tPressing the numeric keypad can skip \u201cENT\u201d input.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Recipe Selection<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1.\tBlink the recipe number.
\n2.\tUse numeric keypad to enter the double-digit recipe number
\n3.\tDisplay recipe contents
\n4.\tUse \u2191 or \u2193 keys to scroll through the recipe steps.
\n5.\tChange \u201cNO\u201d into \u201cST\u201d to display the step number in the recipe.
\n6.\tPress \"ESC\" to return to the menu.
\n7.\tPress \"ENT\" to enter the pre-operating state.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Pre-operation<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1.\tMake sure that EMG switch is off and the vacuum switch is on, and then press \"START\" to start the operation.
\n2.\tPress \"ESC\" to return to the recipe selection.
\n3.\tVacuum pressure is displayed in the upper right corner.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
During Operation<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
\u25cf\t\"V=56\" represents the pressure value (-56kPa).
\n\u25cf\t\u201cSP\" in the fourth line represents the present rpm.
\n\u25cf\t\"SL\" and \"TM\" represent the operating time.
\n\u25cf\t\"SLsec\" represents acceleration\/deceleration time.
\n\u25cf\t\"TMsec\" represents the hold time after the command rpm is reached.
\n\u25cf\tDuring operation, \"VACUUM\" is electrically ignored to maintain substrate suction.
\n\u25cf\tThe emergency stop is performed when the pressure value falls below -50kPa or the safety cover is opened.
\n\u25cf\tWhen \"STOP\" is pressed, the operation immediately stops and recipe selection is shown.
\n\u25cf\t\"START\" switch LED lights blink during operation.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
End of Operation<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
\u25cf\t\u201cEND\u201d is displayed a few seconds after the end of the operation.
\n\u25cf\tOperation display goes back to the pre-operation state\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Emergency Stop (1)<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
\u25cf\tThe emergency stop is performed when the cover is opened.
\n\u25cf\tPush \u201cSTOP\u201d to go back to the menu.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Emergency Stop (2)<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
\u25cf\tThe emergency stop is performed when the vacuum value falls below the set value.
\n\u25cf\tWhen \u201cSTOP\u201d is pushed while EMG switch is off, the display goes back to the menu.
\n\u25cf\tWhen EMG switch is on, an alarm sounds. \n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
How to Set Stop Position<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1.\tSet the angle in \u201cPOSITION.\u201d
\n2.\tSet whether the stop position should be enabled in \"ACTION.\"
\nON (key \u201c1\u201d): Enabled
\nOFF (key \u201c0\u201d): Disabled
\n3.\tPress \"ENT\" to start rotation, and the substrate is set to the specified position.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

How to Set Recipe at Menu<\/h3><\/div><\/div><\/div>
Menu<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1: SET: Enter or modify recipe
\n2: COPY: Copy recipe
\n3: ERASE: Delete recipe
\n\u25cf\tTo access each setting, choose 1, 2 or 3.
\n\u25cf\tPress ESC to return to the menu.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
How to Set Recipe<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
1.\tBlink the recipe number.
\n2.\tSpecify the recipe number in double digits to display recipe contents.
\n3.\tUse \u2191 or \u2193 keys to scroll through the recipe step.
\n4.\tPress \"ENT\" to move the cursor to step 1.
\n<\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div>
5.\tUse arrow keys to move to the item to change.
\n6.\tBlink the letter to modify the value.
\n7.\tPress \"ENT\" to go back to the recipe selection. \n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

How to Operate Customized Model<\/h3><\/div><\/div><\/div>
Menu<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div>
1: EXCUTE - Start operation
\n2: EDIT - Input, delete or copy recipes
\n3: TEST - Start test operation
\n4: POSITION - Set stop position
\n\u25cf\tTo access each setting, choose 1, 2 or 3.
\n5: DISPENSE - Check dispenser operation\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
Operation<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
How to Check Dispense Operation<\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u64cd\u4f5c\u753b\u9762\u306b\u3064\u3044\u3066\"<\/div><\/div>
1.\tUse arrow keys to move the cursor.
\n2.\tSet dispenser position
\n\u2b9a\tSelect \u201cHM\u201d and push \u201cENT\u201d to move the arm to the original position.
\n\u2b9a\tSpecify the number to set the arm position and push \u201cENT\u201d to move the arm to the specified position.
\n3.\tSet the arm\u2019s moving speed at [SPD] and push \u201cENT\u201d to move the arm at the specified speed.
\n4.\tPerform the instillation at the set time by \u201cDIS\u201d selection.
\n5.\tUse \u2191 or \u2193 keys to move the arm.
\n6.\tPress \"ENT\" to go back to the previous screen. When the arm is not in the original position, move the arm is returned there and then the display shows the previous screen.\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\n
\n\t
Recommended Article<\/div>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>
\n
\n\t

\"\u30b9\u30d4\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u30fb\u30b9\u30d4\u30f3\u6d17\u6d44\u6a5f\u30fb\u30b9\u30d4\u30f3\u4e7e\u71e5\u6a5f\"<\/p>\n<\/div>\n<\/div><\/div><\/div><\/div>

\n
\n\t
What is spin coater film thickness?<\/a><\/div>\n

A spin coater is a device that uses the centrifugal force of high-speed rotation to form a coating film on a flat substrate. The ability of the spin coater and the environment setting based on the experience of the engineer using the spin coater have a great influence on how to obtain the ideal coating film.<\/p>\n

The key to achieving this is the creation of a spinning program. ...
\nContinue<\/a><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

List of Spin Coater Standard Machines (Tabletop Type)<\/h3><\/div><\/div><\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-220A\u2161<\/h6>\r\n
Price: JPY 700,000
\r\nFor 4-inch wafer
\r\n(substrate size: \u03c6100 mm \/ \u25a170mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-220D\u2161<\/h6>\r\n
<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-300A\u2161<\/h6>\r\n
Price: JPY 800,000
\r\nFor with 6-inch wafer
\r\n(substrate size: \u03c6150 mm \/ \u25a1110mm)
\r\n
\r\n
\r\n\u5c0f\u578b\u30fb\u5353\u4e0a\u578b<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-300D\u2161<\/h6>\r\n
<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-400A\u2161<\/h6>\r\n
ACT-400A II
\r\nPrice: JPY 1,50,000
\r\nFor with 8-inch wafer<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-450A\u2161<\/h6>\r\n
Price: Contact us
\r\nFor with 10-inch wafer
\r\n(substrate size: \u03c6250 mm \/ \u25a1180mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-500A\u2161<\/h6>\r\n
Price: Contact us
\r\nFor with 12-inch wafer
\r\n(substrate size: \u03c6300 mm \/ \u25a1220mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

How to spin coater<\/h3><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Structure<\/div>\n\t
Learn the spin coater's structure, parts, and the relationship between the cup's inner diameter and substrate sizes.<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Configuration<\/div>\n\t
Active's spin coaters enable various configurations in accordance with the purpose of use, such as rotation speed, acceleration\/deceleration and hold time<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Display screen<\/div>\n\t
Various programs can be easily input on this simple panel. <\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Sample table's materials and chemical tolerance<\/div>\n\t
Check the sample table's materials and its chemical tolerance.<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

Various programs and settings in a simple displayEasy to program and check test conditionsOur spin coater’s operation display shows real-time rpm and vacuum pressure. A variety of programs can be easily entered through the simple display. The character display LCD module used in standard models can display up to 80 characters (20 characters x 4 […]<\/p>\n","protected":false},"author":3,"featured_media":0,"parent":11021,"menu_order":50,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_locale":"en_US","_original_post":"https:\/\/angangsm.com\/?page_id=1811","footnotes":""},"categories":[],"tags":[],"class_list":["post-11825","page","type-page","status-publish","hentry","en-US"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11825","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/comments?post=11825"}],"version-history":[{"count":4,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11825\/revisions"}],"predecessor-version":[{"id":12188,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11825\/revisions\/12188"}],"up":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11021"}],"wp:attachment":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/media?parent=11825"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/categories?post=11825"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/tags?post=11825"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}