{"id":11821,"date":"2024-09-26T05:48:52","date_gmt":"2024-09-25T20:48:52","guid":{"rendered":"https:\/\/angangsm.com\/?page_id=11821"},"modified":"2024-11-26T06:04:08","modified_gmt":"2024-11-25T21:04:08","slug":"size","status":"publish","type":"page","link":"https:\/\/angangsm.com\/en\/spincoater\/size\/","title":{"rendered":"Cup Inner Diameter and Substrate Size"},"content":{"rendered":"

Cup Inner Diameter, Substrate Size and Sample Stage<\/h3><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\u3000\u30ab\u30c3\u30d7\u5185\u5f84\u3068\u57fa\u677f\u30b5\u30a4\u30ba\"
Image of substrate, sample stage and cup inner diameter.<\/figcaption><\/figure><\/div><\/div><\/div>
The left figure shows the image of the substrate size and cup's inner diameter of a standard model.
\nThe larger the inner diameter of the cup, the larger the substrate that can be accommodated. Our desktop model is classified according to the inner diameter. The larger the model number, the larger the substrate that can be spin-coated.
\nThe substrate size indicated in the model specification does not refer to the maximum substrate size that can be physically spin-coated but rather the size within the guaranteed range for safety.
\nA sample stage shown in the figure is essential for spin coating. It is provided as an option depending on the characteristics and size of the substrate and the chemical solution to be applied. Since the shape and material are determined according to the application, the price of the sample stage varies on a case-by-case basis.
\nAlso, although not shown in the figure, an optional vacuum pump is required. We will select the appropriate pump according to the required adsorption force.
\nThe size of the substrate must be larger than the adsorption area of the sample stage to suction the substrate with the vacuum. If the size is too small, the substrate cannot be suctioned. Conversely, if it is too large, there is a risk that the substrate will be blown away during rotation due to the narrow vacuum suction area.
\nHaving a separate sample stage for each substrate is recommended if you have multiple substrates. Please contact us with information on all substrates if one stage can accommodate multiple substrates.\nIn addition, there is a method to fix a substrate to be suctioned without a vacuum.<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
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Recommended Article<\/div>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div>
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\"\u30b9\u30d4\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u30fb\u30b9\u30d4\u30f3\u6d17\u6d44\u6a5f\u30fb\u30b9\u30d4\u30f3\u4e7e\u71e5\u6a5f\"<\/a><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div>

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How to Set Recipe and What Is Step<\/a><\/div>\n

Below are data by material for the sample stage, an essential option for the spin coater.
\nThese are general data and are not guaranteed values for the product.<\/p>\n

Continue<\/a><\/p>\n<\/div>\n<\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

List of Spin Coater Standard Machines (Tabletop Type)<\/h3><\/div><\/div><\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-220A\u2161<\/h6>\r\n
Price: JPY 700,000
\r\nFor 4-inch wafer
\r\n(substrate size: \u03c6100 mm \/ \u25a170mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-220D\u2161<\/h6>\r\n
<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-300A\u2161<\/h6>\r\n
Price: JPY 800,000
\r\nFor with 6-inch wafer
\r\n(substrate size: \u03c6150 mm \/ \u25a1110mm)
\r\n
\r\n
\r\n\u5c0f\u578b\u30fb\u5353\u4e0a\u578b<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-300D\u2161<\/h6>\r\n
<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-400A\u2161<\/h6>\r\n
ACT-400A II
\r\nPrice: JPY 1,50,000
\r\nFor with 8-inch wafer<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-450A\u2161<\/h6>\r\n
Price: Contact us
\r\nFor with 10-inch wafer
\r\n(substrate size: \u03c6250 mm \/ \u25a1180mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div>
\r\n \r\n
\r\n \r\n
\r\n
ACT-500A\u2161<\/h6>\r\n
Price: Contact us
\r\nFor with 12-inch wafer
\r\n(substrate size: \u03c6300 mm \/ \u25a1220mm)<\/div>\r\n <\/div>\r\n <\/div>\r\n
\r\n See details<\/span>\r\n <\/div>\r\n <\/a>\r\n <\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>

How to spin coater<\/h3><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Structure<\/div>\n\t
Learn the spin coater's structure, parts, and the relationship between the cup's inner diameter and substrate sizes.<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
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Configuration<\/div>\n\t
Active's spin coaters enable various configurations in accordance with the purpose of use, such as rotation speed, acceleration\/deceleration and hold time<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Display screen<\/div>\n\t
Various programs can be easily input on this simple panel. <\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>
\"\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u30fc\"<\/a><\/div><\/div><\/div>
\n\t
Sample table's materials and chemical tolerance<\/div>\n\t
Check the sample table's materials and its chemical tolerance.<\/div>\n\t
See article <\/i><\/span><\/div>\n<\/a><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div>","protected":false},"excerpt":{"rendered":"

Cup Inner Diameter, Substrate Size and Sample StageImage of substrate, sample stage and cup inner diameter.The left figure shows the image of the substrate size and cup’s inner diameter of a standard model. The larger the inner diameter of the cup, the larger the substrate that can be accommodated. Our desktop model is classified according […]<\/p>\n","protected":false},"author":3,"featured_media":0,"parent":11021,"menu_order":40,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_locale":"en_US","_original_post":"https:\/\/angangsm.com\/?page_id=526","footnotes":""},"categories":[],"tags":[],"class_list":["post-11821","page","type-page","status-publish","hentry","en-US"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11821","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/comments?post=11821"}],"version-history":[{"count":3,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11821\/revisions"}],"predecessor-version":[{"id":12190,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11821\/revisions\/12190"}],"up":[{"embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/pages\/11021"}],"wp:attachment":[{"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/media?parent=11821"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/categories?post=11821"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/angangsm.com\/wp-json\/wp\/v2\/tags?post=11821"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}